8 results
Structural and electrical characterization of n+-type ion-implanted 6H-SiC
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- Journal:
- The European Physical Journal - Applied Physics / Volume 27 / Issue 1-3 / July 2004
- Published online by Cambridge University Press:
- 15 July 2004, pp. 239-242
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- July 2004
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Functional voids by gas ion implantation for applications in semiconductor processing
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- Journal:
- MRS Online Proceedings Library Archive / Volume 719 / 2002
- Published online by Cambridge University Press:
- 01 February 2011, F7.1
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- 2002
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Structural and Electrical Characterisation of Nickel Silicides Contacts on Silicon Carbide
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- Journal:
- MRS Online Proceedings Library Archive / Volume 680 / 2001
- Published online by Cambridge University Press:
- 21 March 2011, E6.9
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- 2001
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Voids in Silicon by He Implantation: From Basic to Applications
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- Journal:
- Journal of Materials Research / Volume 15 / Issue 7 / July 2000
- Published online by Cambridge University Press:
- 31 January 2011, pp. 1449-1477
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- July 2000
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Kinetics of the C49-C54 transformation in patterned and blanket TiSi2 films: a comparison.
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- Journal:
- MRS Online Proceedings Library Archive / Volume 514 / 1998
- Published online by Cambridge University Press:
- 10 February 2011, 219
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- 1998
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Localized Lifetime Control In Silicon Bipolar Power Devices By Voids Induced By He Ion Implantation
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- Journal:
- MRS Online Proceedings Library Archive / Volume 483 / 1997
- Published online by Cambridge University Press:
- 10 February 2011, 45
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- 1997
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Titanium Silicidation and Secondary Defect Annihilation in ION Beam Processed Sige Layers
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- Journal:
- MRS Online Proceedings Library Archive / Volume 402 / 1995
- Published online by Cambridge University Press:
- 15 February 2011, 149
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- 1995
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Avoiding Dislocation Formation for B, P, and As Implants in Silicon
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- Journal:
- MRS Online Proceedings Library Archive / Volume 235 / 1991
- Published online by Cambridge University Press:
- 28 February 2011, 173
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- 1991
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